3M™ Trizact™ Pad Conditioner
- 3M ID B5005049057
Details
Hoogtepunten
- Precisely engineered 3D microreplicated ceramic structures coated with CVD diamond
- Accurately controlled microreplicated structures
- Consistent performance disk-to-disk and the metal-free cutting surface
- Ideal for advanced node processes sensitive to metallic contamination
Bringing together 3M’s know-how in abrasives, ceramics and microreplication, the 3M™ Trizact™ Pad Conditioner is an innovative pad conditioner for Chemical Mechanical Polishing (CMP) for advanced node semiconductor manufacturing.
Specificaties
| Toepassing | Geavanceerd knooppunt (geheugen en logica), Wafelproductie, CMP |
